Semiconductor Filtration
Reducing contaminants is crucial in semiconductor manufacturing. Any particles or metals not removed during production can lead to defects, or even product recalls, later. That’s why you need the proven performance of 3M filtration products for every step in your manufacturing process.
Semiconductor Filtration Process
Applications for Semiconductor
For more than 100 years, 3M Purification has developed innovative filtration and purification products by partnering with our customers to meet the ever-evolving needs of semiconductor manufacturing.
UltraPure Water | UltraPure water (UPW) is mainly used to remove defect-causing contaminants from the wafer surface and to rinse or clean wafers after they have been exposed to chemicals during various processes. 3M Purification’s filtration and gas transfer membrane products provide the required particle reduction and dissolved gas (O₂ & CO₂) reduction to meet the strict requirements of semiconductor and electronics industry. Featured Products 3M™ High Flow Series Filter Cartridge 3M™ LifeASSURE™ EPF Series Filter Cartridge |
Chemical Mechanical Polishing | Chemical mechanical polishing (CMP) is a process to level uneven areas by combining a chemical (acidic or basic) slurry of micro-abrasives with mechanical force provided by polishing. In multilevel metallization processes, as each new metal layer gets added it magnifies the imperfections in the layer just below it. CMP allows for subsequent photolithography processes to take place with greater accuracy. 3M Purification has the filtration solutions to control particle size in the slurries used in the CMP process to allow chipmakers to continue shrinking circuity needed in next generation devices. Featured Products |
Lithography/High Purity Chem | Photolithography is a process used to pattern circuitry on a wafer. Removing unwanted organic contaminants, particles and ionic metal species from high purity chemicals supports the advancement of miniaturization of devices. Filtration and purification products from 3M Purification allow you to reduce contaminants to meet the needs of high-performance semiconductor manufacturing. Featured Products 3M™ NanoSHIELD™ Hollow Fiber Series Filter Cartridge |
Electrolyte Plating | ElectroPlating solutions require both stringent particle and dissolved gas control to prevent defects and impurities in the deposited metal layer. 3M Purification has both particle and and dissolved gas solutions to meet the needs for your electroplating process. Featured Products 3M™ LifeASSURE™ EPF Series Filter Cartridge 3M™ LifeASSURE™ EMC Series Filter Cartridge |
Wet Cleaning Chemicals | During wet processing, semiconductor devices are repeatedly dipped, immersed, or sprayed with solutions Even when cleaning steps are performed, the primary reason for device failure is contamination of the wafer surface. As device features continue to shrink, ensuring the purity of acids, bases, and solvents used in the manufacture process will remain critical. From most acids and bases to alcohols and etchants, 3M has the filter for your chemical application. Featured Products 3M™ NanoSHIELD™ Hollow Fiber Series Filter Cartridge 3M™ LifeASSURE™ EMC Series Filter Cartridge |
Wastewater | Manufacturing semiconductors requires large amounts of chemicals, which invariably generates substantial volumes of wastewater. The many different fabrication processes create a variety of wastewater contaminants. 3M Purification has filtration solutions designed to help you filter your wastewater to protect the environment and meet increasingly stringent discharge requirements. Featured Products 3M™ High Flow Series Filter Cartridge 3M™ MicroKlean™ RT Series Filter Cartridge |
Dissolved Gas Control | 3M™ Liqui-Cel™ Membrane Contactors provide efficient dissolved gas control in a compact design. Capable of adding gases to or removing dissolved gases and bubbles from compatible liquid streams, these gas transfer devices utilize hollow fiber membrane technology that help facilities around the world improve operating efficiency, performance and protect product quality. Featured Products |